DocumentCode
1842036
Title
High precision control for piezo-actuated XY-table
Author
Xinkai Chen
Author_Institution
Dept. of Electron. Inf. Syst., Shibaura Inst. of Technol., Saitama, Japan
fYear
2012
fDate
11-14 Dec. 2012
Firstpage
2381
Lastpage
2386
Abstract
The piezo-actuated XY-table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-table is a challenging task. This paper discusses the high precision adaptive control for the XY-table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.
Keywords
adaptive control; control nonlinearities; friction; hysteresis; piezoelectric actuators; position control; stability; PEA; PM; Prandtl-Ishlinskii model; control law; friction; global stability; high precision adaptive control; hysteretic nonlinearity; piezoactuated XY-table; piezoelectric actuator; position error; positioning mechanism; zero asymptotic control;
fLanguage
English
Publisher
ieee
Conference_Titel
Robotics and Biomimetics (ROBIO), 2012 IEEE International Conference on
Conference_Location
Guangzhou
Print_ISBN
978-1-4673-2125-9
Type
conf
DOI
10.1109/ROBIO.2012.6491326
Filename
6491326
Link To Document