Micro-electro-mechanical relays-design concepts and process demonstrations

Author

Lee, Han S. ; Leung, Chi H. ; Shi, Jenny ; Chang, Shih-Chia

Author_Institution

Delphi Res. Labs., Shelby Township, MI, USA

fYear

2004

fDate

20-23 Sept. 2004

Firstpage

242

Lastpage

247

Abstract

MEMS relays designed for automotive applications were investigated and various fabrication techniques reviewed. Several micro-relay structures, of approximately 2 mm×1 mm×0.01 mm, were then made by electroforming with copper as the structural part and gold plated copper as the electrical contact part. Electrostatic actuation was achieved in all designs and on-off switching of small electrical loads (up to 1A, 12 VDC) tested. Various cleanroom electroforming and cleaning processes were discussed to improve contact resistance and structure durability. The various designs were compared for ease of fabrication, electrostatic actuation and switching performance. The feasibility of such MEMS relays in automotive applications was evaluated.

Keywords

automotive electronics; clean rooms; cleaning; contact resistance; copper; durability; electrical contacts; electroforming; electrostatic actuators; gold; microrelays; 1 A; 12 V; Au-Cu; Cu; MEMS relays; automotive applications; cleaning processes; cleanroom electroforming; contact resistance; electrical contact part; electrostatic actuation; electrostatic switching; gold plated copper; microelectromechanical relays design; microrelay structures; process demonstrations; structure durability; Automotive applications; Contacts; Copper; Electrostatic actuators; Fabrication; Gold; Micromechanical devices; Microrelays; Relays; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical Contacts, 2004. Proceedings of the 50th IEEE Holm Conference on Electrical Contacts and the 22nd International Conference on Electrical Contacts

Print_ISBN

0-7803-8460-1

Type

conf

DOI

10.1109/HOLM.2004.1353125

Filename

1353125