A technique for characterizing AC performance with a DC parametric tester

Author

Merrill, Richard ; Issaq, Enayet ; Gomersal, Edson

Author_Institution

Nat. Semicond. Fairchild Res. Center, Santa Clara, CA, USA

fYear

1990

fDate

5-7 March 1990

Firstpage

229

Lastpage

231

Abstract

A method for measuring circuit propagation delays with a DC parametric tester is demonstrated. The technique is suitable for any normal production electrical test operation. Experimental results that demonstrate exceptional accuracy (<3% error) are presented. Possible applications include improved final test yield, improved feedback to foundry on AC results, and inclusion of AC parameters in the electrical specification of the process in addition to the traditional DC parameters. The test structure consists of an on-chip CMOS ring oscillator and F/V convertor.<>

Keywords

CMOS integrated circuits; integrated circuit technology; integrated circuit testing; oscillators; voltage-frequency convertors; CMOS ring oscillator; DC parametric tester; F/V convertor; accuracy; characterizing AC performance; circuit propagation delay measurement; feedback to foundry on AC results; final test yield; frequency voltage convertor; production electrical test; test structure; Assembly; Capacitors; Circuit optimization; Circuit testing; Costs; Electric variables measurement; Foundries; Integrated circuit interconnections; Semiconductor device testing; Threshold voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronic Test Structures, 1990. ICMTS 1990. Proceedings of the 1990 International Conference on

Conference_Location

San Diego, CA, USA

Type

conf

DOI

10.1109/ICMTS.1990.67908

Filename

67908