Control design for division and compensation with application to high-speed/large-range nano-positioning

In this paper an easy to implement control design strategy is proposed to achieve large range and high speed nano-positioning. The designed controllers aim to divide the positioning task between multiple large range/low speed and small range/high speed nano-positioners. Each controller assigns the proper frequency range to individual nano-positioners, and simultaneously compensates for the corresponding excited dynamics at high positioning speeds. Control design is formulated in the form of several single input-single output (SISO) system identification problems. The proposed approach removes the need for fundamental changes in the design of the conventional scanners such as piezo tubes for applications necessitating high speed and large range nano-positioning.