Design and Simulation of a Piezoelectrically Actuated Micropump for the Drug Delivery System

Author

Cui, Qifeng ; Liu, Chengliang ; Zha, Xuan F William

Author_Institution

Sch. of Mech. Eng., Shanghai Jiao Tong Univ.

fYear

2006

fDate

8-10 Oct. 2006

Firstpage

45

Lastpage

50

Abstract

In this paper, we present a new piezoelectrically actuated valveless micropump for the drug delivery system. A simple fabrication process is based on the deep reactive ion-etching (DRIE), glass etching and the anodical bond. The diffuser/nozzle element has the divergence angle of 9.4deg, the width of 0.1 mm for the narrowest part and the length of 1.1 mm. The pressure loss coefficient of the diffuser/nozzle element is analytically studied using the fluid mechanics method. In order to analyze the relationship between the behavior of the micropump membrane and the actuating frequency, the numerical simulation is accomplished by using the ANSYS software. Furthermore, the influences of piezoelectric actuator dimensions and material properties on the natural frequency are also studied to understand the characteristics of the actuator

Keywords

drug delivery systems; finite element analysis; fluid mechanics; micropumps; piezoelectric actuators; sputter etching; ANSYS software; actuator characteristics; anodical bond; deep reactive ion-etching; drug delivery system; fluid mechanics; glass etching; natural frequency; piezoelectrically actuated valveless micropumps; serial planar micropumps; Biomembranes; Bonding; Drug delivery; Etching; Fabrication; Frequency; Glass; Micropumps; Numerical simulation; Piezoelectric actuators;

fLanguage

English

Publisher

ieee

Conference_Titel

Automation Science and Engineering, 2006. CASE '06. IEEE International Conference on

Conference_Location

Shanghai

Print_ISBN

1-4244-0310-3

Electronic_ISBN

1-4244-0311-1

Type

conf

DOI

10.1109/COASE.2006.326853

Filename

4120319