• DocumentCode
    1853515
  • Title

    Characterization of hydrogenated amorphous silicon thin-film solar cell defects using optical beam induced current imaging and focused ion beam cross-sectioning technique

  • Author

    Meng, L. ; Steen, S. ; Koo, C.K. ; Bhatia, C.S. ; Street, A.G. ; Joshi, P. ; Kim, Y.H. ; Phang, J.C.H.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore
  • fYear
    2011
  • fDate
    19-24 June 2011
  • Abstract
    Defects in hydrogenated amorphous silicon (a-Si:H) thin-film solar cells were localized by optical beam induced current (OBIC) imaging and then characterized using focused ion beam (FIB) cross-sectioning technique. It was found that nano-voids in the active silicon layer and transparent conductive oxide underneath the back electrode were the main causes of OBIC signal reduction.
  • Keywords
    amorphous semiconductors; crystal defects; elemental semiconductors; focused ion beam technology; semiconductor thin films; silicon; solar cells; back electrode; focused ion beam cross-sectioning technique; hydrogenated amorphous silicon thin-film solar cell defects; nanovoids; optical beam induced current imaging; transparent conductive oxide; Contacts; Image edge detection; Imaging; Ion beams; Performance evaluation; Photovoltaic cells; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Photovoltaic Specialists Conference (PVSC), 2011 37th IEEE
  • Conference_Location
    Seattle, WA
  • ISSN
    0160-8371
  • Print_ISBN
    978-1-4244-9966-3
  • Type

    conf

  • DOI
    10.1109/PVSC.2011.6185850
  • Filename
    6185850