Microfabricated neural thermocouple arrays probe for brain research

Author

Lee, B.C. ; Lim, Y.-G. ; Kim, K.-H. ; Lee, S. ; Moon, S.

Author_Institution

Nano-Bio Res. Center, KIST, Seoul, South Korea

fYear

2009

fDate

21-25 June 2009

Firstpage

338

Lastpage

341

Abstract

A microfabricated neural thermocouple arrays probe (NTAP) is proposed for measuring and comparing the temperature of local brain area in real time sensing. Four junctions of T type thin film thermocouple arrays were fabricated on a sharp silicon probe tip. Each junction size was 20 mum by 20 mum. The average seebeck coefficient was 15.12 muV/^oC and the dynamic response time was 0.78 sec. The temperature of both inside and outside the mouse´s thalamus was measured. The result showed that the temperature inside the mouse´s thalamus was about 4degC higher than that of the outside.

Keywords

Seebeck effect; bioMEMS; biomedical measurement; biothermics; brain; elemental semiconductors; microfabrication; neurophysiology; silicon; temperature measurement; thermocouples; Si; T type thin film thermocouple; brain area; dynamic response; mouse thalamus; neural thermocouple array probe microfabrication; real-time sensing; silicon probe; size 20 mum; temperature 4 degC; temperature measurement; time 0.78 s; Fluorescence; Infrared detectors; Mice; Micromechanical devices; Monitoring; Needles; Probes; Silicon on insulator technology; Temperature measurement; Temperature sensors; Brain Research; MEMS; Mouse´s Thalamus; Neural Thermocouple Arrays Probe;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International

Conference_Location

Denver, CO

Print_ISBN

978-1-4244-4190-7

Electronic_ISBN

978-1-4244-4193-8

Type

conf

DOI

10.1109/SENSOR.2009.5285495

Filename

5285495