DocumentCode
1855121
Title
Identification of acoustic wave modes in piezoelectric substrates
Author
Haisch, Kevin ; Atashbar, Massood Z. ; Bazuin, Bradley J.
Author_Institution
Dept. of Electr. & Comput. Eng., Western Michigan Univ., Kalamazoo, MI
fYear
2005
fDate
22-25 May 2005
Lastpage
5
Abstract
This paper describes the development of MATLAB code to find dominant modes of acoustic waves in piezoelectric substrate versus range of velocities that substrate can support. In general, these modes of propagation are Rayleigh SAW, leaky SAW, shallow bulk acoustic wave, and bulk acoustic wave. Because each mode of propagation travels at a different velocity, this program is valuable for evaluating various wave velocities in a particular substrate rotation. The code plots the poles of the complex effective permittivity versus the wave velocity. The pole components (real and imaginary) indicate the wave type, and the magnitude of the poles show which wave is dominant in the particular substrate orientation. Each step of this process is discussed, and the results of the MATLAB program are benchmarked against those of a similar program from Chiba University, Japan
Keywords
Rayleigh waves; acoustic wave propagation; bulk acoustic wave devices; permittivity; piezoelectric materials; substrates; surface acoustic waves; MATLAB code; MATLAB program; Rayleigh SAW; acoustic wave modes; complex effective permittivity; leaky SAW; piezoelectric substrates; pole components; shallow bulk acoustic wave; substrate orientation; wave velocity; Acoustic devices; Acoustic propagation; Acoustic waves; Acoustical engineering; MATLAB; Permittivity; Piezoelectric materials; Surface acoustic wave devices; Surface acoustic waves; Surface waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Electro Information Technology, 2005 IEEE International Conference on
Conference_Location
Lincoln, NE
Print_ISBN
0-7803-9232-9
Type
conf
DOI
10.1109/EIT.2005.1626993
Filename
1626993
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