Nanoporous silicon as a bulk energetic material

Author

Currano, L. ; Churaman, W. ; Becker, C.

Author_Institution

U.S. Army Res. Lab., Adelphi, MD, USA

fYear

2009

fDate

21-25 June 2009

Firstpage

2172

Lastpage

2175

Abstract

Nanoporous energetic silicon is a promising new energetic material that can be integrated on-chip using current silicon bulk micromachining techniques. In this paper, we present the characteristics of the nanoenergetic reaction, including energy output, gas generation, and chemical products. The energy output is measured as 9.2 kJ/g, more than double that of TNT. The gas generation was measured as 0.019 mol/g, about 50% higher than black powder. Finally we demonstrate integration of the nanoporous silicon alongside a MEMS acceleration switch.

Keywords

chemical products; elemental semiconductors; micromachining; microswitches; nanoporous materials; silicon; MEMS acceleration switch; Si; black powder; bulk energetic material; chemical products; current silicon bulk micromachining techniques; energy output; gas generation; integrated on-chip; nanoenergetic reaction; nanoporous silicon; Atomic measurements; Current density; Etching; Ethanol; Hafnium; Ignition; Nanoporous materials; Silicon; Temperature; Wire; Energetic; explosive; nano; porous; silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International

Conference_Location

Denver, CO

Print_ISBN

978-1-4244-4190-7

Electronic_ISBN

978-1-4244-4193-8

Type

conf

DOI

10.1109/SENSOR.2009.5285607

Filename

5285607