Compositional and structural characterization by TEM of lattice-mismatched III-V epilayers

We discuss compositional and structural transmission electron microscopy (TEM) characterization of lattice-mismatched (LMM) III-V epilayers grown on GaAs by metalorganic chemical vapor deposition (MOCVD), with possible applications in high-efficiency multijunction solar cells. In addition to the use of TEM imaging to survey layer thicknesses and defect morphology, our analysis emphasizes the particular methods of energy-dispersive X-ray spectrometry (EDX) and convergent-beam electron diffraction (CBED). Outlined here is a standards-based method for extracting compositions by EDX, which uses principal-component analysis (PCA) [1], combined with the zeta-factor approach of Watanabe and Williams [2]. A procedure is described that uses the coordinates of high-order Laue zone (HOLZ) lines, which are found in the bright-field disks of CBED patterns, to extract composition and strain parameters from embedded epilayers. The majority of the crystal growth for this work was performed at NREL, which has accommodated the development at SDSM&T of the characterization techniques described. However, epilayer deposition capability at SDSM&T has recently been achieved, using a home-built system, which is presently being used to examine new lattice-mismatched structures relevant to photovoltaic technology.