Multielement structure of mechanical resonant sensors and optical readout system for acoustic signal analysis

The multielement structure of mechanical resonant sensors for acoustic signal processing and analysis is offered. Microstrings various length and diameter with resonant frequencies over the range of 100 Hz - 20 kHz are used as resonant sensors. The techniques of the structure fabrication and the definition of resonant frequencies of string sensors are developed. The design of the optical readout system based on CMOS camera and the oscillation amplitude measurement procedure for the acoustic signal frequency spectrum definition are offered.