• DocumentCode
    1857554
  • Title

    Bending effect of Si MOSFETs on flexible plastic substrate

  • Author

    Kao, H.L. ; Chang, Y.C. ; Lin, B.S. ; Huang, M.H. ; Kao, C.H.

  • Author_Institution
    Dept. of Electron. Eng., Chang Gung Univ., Taoyuan
  • fYear
    2008
  • fDate
    28-30 April 2008
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    By applying ~0.27% tensile strain to the flexible die of a 0.16 mum thin-body (100 mum) Si MOSFET mounted on plastic, the DC characteristics have been improved. The small DC performance degradation of the Si MOSFET transferred to plastic shows the potential of integrating electronics onto plastic. The device performance was improved by flexing the substrate to create stress, which produced a 10.7% enhancement of the saturation drain current and only 0.003 V Vth is lower. The approach has the advantages of flexible electronics on the insulating plastic substrate and low cost.
  • Keywords
    MOSFET; bending; elemental semiconductors; flexible electronics; silicon; MOSFET; Si; bending effect; flexible electronics; flexible plastic substrate; insulating plastic substrate; saturation drain current; size 0.16 mum; size 100 mum; small DC performance degradation; tensile strain; thin-body; Capacitive sensors; Costs; Degradation; Flexible electronics; MOSFETs; Organic thin film transistors; Plastics; Substrates; Tensile strain; Thin film transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Devices, Circuits and Systems, 2008. ICCDCS 2008. 7th International Caribbean Conference on
  • Conference_Location
    Cancun
  • Print_ISBN
    978-1-4244-1956-2
  • Electronic_ISBN
    978-1-4244-1957-9
  • Type

    conf

  • DOI
    10.1109/ICCDCS.2008.4542621
  • Filename
    4542621