DocumentCode
1857554
Title
Bending effect of Si MOSFETs on flexible plastic substrate
Author
Kao, H.L. ; Chang, Y.C. ; Lin, B.S. ; Huang, M.H. ; Kao, C.H.
Author_Institution
Dept. of Electron. Eng., Chang Gung Univ., Taoyuan
fYear
2008
fDate
28-30 April 2008
Firstpage
1
Lastpage
4
Abstract
By applying ~0.27% tensile strain to the flexible die of a 0.16 mum thin-body (100 mum) Si MOSFET mounted on plastic, the DC characteristics have been improved. The small DC performance degradation of the Si MOSFET transferred to plastic shows the potential of integrating electronics onto plastic. The device performance was improved by flexing the substrate to create stress, which produced a 10.7% enhancement of the saturation drain current and only 0.003 V Vth is lower. The approach has the advantages of flexible electronics on the insulating plastic substrate and low cost.
Keywords
MOSFET; bending; elemental semiconductors; flexible electronics; silicon; MOSFET; Si; bending effect; flexible electronics; flexible plastic substrate; insulating plastic substrate; saturation drain current; size 0.16 mum; size 100 mum; small DC performance degradation; tensile strain; thin-body; Capacitive sensors; Costs; Degradation; Flexible electronics; MOSFETs; Organic thin film transistors; Plastics; Substrates; Tensile strain; Thin film transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Devices, Circuits and Systems, 2008. ICCDCS 2008. 7th International Caribbean Conference on
Conference_Location
Cancun
Print_ISBN
978-1-4244-1956-2
Electronic_ISBN
978-1-4244-1957-9
Type
conf
DOI
10.1109/ICCDCS.2008.4542621
Filename
4542621
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