Pyroelectric IR sensor array using lead-free pyroelectric NBT thin film on epitaxial γ-Al2O3/si(100) substrates

Author

Sugai, T. ; Kikuchi, K. ; Yoshita, R. ; Akai, D. ; Sawada, K. ; Ishida, M.

Author_Institution

Dept. of EEE, Toyohashi Univ. of Technol., Toyohashi, Japan

fYear

2009

fDate

21-25 June 2009

Firstpage

1971

Lastpage

1974

Abstract

In this work, we fabricated lead-free pyroelectric infrared (IR) sensor array on epitaxial gamma-Al₂O₃/Si(100) substrates with signal processing circuit using pyroelectric (Na_0.5Bi_0.5)TiO₃ (NBT) thin film deposited by chemical solution deposition (CSD), and we also investigated feasibility of NBT thin film in Si processes.

Keywords

ferroelectric thin films; infrared detectors; infrared imaging; niobium compounds; pyroelectric detectors; pyroelectricity; sensor arrays; (Na_0.5Bi_0.5)TiO₃; Al₂O₃-Si; NBT thin film; chemical solution deposition; pyroelectric IR sensor array; Chemical sensors; Environmentally friendly manufacturing techniques; Gamma ray detectors; Infrared sensors; Pyroelectricity; Semiconductor thin films; Sensor arrays; Sputtering; Thin film circuits; Thin film sensors; γ-Al2O3 (Na0.5Bi0.5) TiO3 thin film; Infrared detectors; pyroelectric detectors;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International

Conference_Location

Denver, CO

Print_ISBN

978-1-4244-4190-7

Electronic_ISBN

978-1-4244-4193-8

Type

conf

DOI

10.1109/SENSOR.2009.5285677

Filename

5285677