High electromechanical coupling in PZT epitaxial thick film resonators at 550 ºC

Author

Yanagitani, Takahiko ; Katada, Katsuyoshi ; Suzuki, M. ; Wasa, Kiyotaka

Author_Institution

Nagoya Inst. of Technol., Nagoya, Japan

fYear

2014

fDate

19-22 May 2014

Firstpage

1

Lastpage

3

Abstract

A shift of Curie temperature is reported only in a very thin epitaxial film. In this study, unusual high temperature shift of Curie temperature in thick PZT and PbTiO₃ film was demonstrated. Thickness extensional mode electromechanical coupling coefficient k_t of the films were extracted from high-overtone bulk acoustic resonator structure. Thick PZT epitaxial (with 4.4 μm) films exhibit high k_t of 0.30 at 500 °C and 0.37 at 550 °C. Moreover, high k_t of 0.42 was also observed in thick PbTiO₃ film (with 2.8 μm) at 550 °C.

Keywords

Curie temperature; crystal resonators; electromechanical effects; lead compounds; thick film devices; titanium compounds; zirconium compounds; Curie temperature; PZT; PZT epitaxial thick film resonators; PbTiO₃; acoustic resonator structure; electromechanical coupling coefficient; high temperature shift; size 2.8 mum; size 4.4 mum; temperature 500 C; temperature 550 C; thick PZT film; thickness extensional mode; Couplings; Epitaxial growth; Loss measurement; Substrates; Temperature; Temperature sensors; (key words); Electromechanical coupling coefficient; High temperature piezoelectric material; Shift of Curie temperature; Thick epitaxial PZT film;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium (FCS), 2014 IEEE International

Conference_Location

Taipei

Type

conf

DOI

10.1109/FCS.2014.6859872

Filename

6859872