Response signal enhancement of film bulk acoustic Resonator mass sensor with bounded hydrophobic Teflon film

Author

Menglun Zhang ; Weiwei Cui ; Daihua Zhang ; Wei Pang ; Hao Zhang

Author_Institution

State Key Lab. of Precision Meas. Technol. & Instrum., Tianjin Univ., Tianjin, China

fYear

2014

fDate

19-22 May 2014

Firstpage

1

Lastpage

4

Abstract

Film bulk acoustic resonator (FBAR) mass sensor has been widely explored for detection of chemical and biological events. In this paper, an FBAR sensor bounded by hydrophobic Teflon film has been fabricated and tested. Experimental results in Hg²⁺ detection demonstrate that the Teflon film bordering around the sensor enhances signal of the sensor by at least an order of magnitude. The improved FBAR sensor has a great potential to be employed in ultra-sensitive investigations of chemical or biological systems.

Keywords

acoustic resonators; bulk acoustic wave devices; chemical sensors; hydrophobicity; mass measurement; mercury (metal); thin film sensors; FBAR mass sensor; Hg; biological event detection; bounded hydrophobic teflon film; chemical event detection; film bulk acoustic resonator mass sensor; response signal enhancement; Film bulk acoustic resonators; Films; Gold; Liquids; Resonant frequency; Sensitivity; Signal to noise ratio; FBAR sensor; Hg²⁺ detection; Teflon film; signal enhancement;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium (FCS), 2014 IEEE International

Conference_Location

Taipei

Type

conf

DOI

10.1109/FCS.2014.6859917

Filename

6859917