Electrostatic lens characterization through nanorobotic manipulation

Carbon nanotube can be used as an emitter for electron-beam-induced deposition, but the electron beam size is limited to micro scale and therefore cannot he used for creating 3D structures with high resolution. In order to focus the electron beam we created a single hole electrostatic lens and determined its characteristics through nanorobotic manipulation. We used a carbon nanotube bundle as emitter and measured its field emission property. The focused effect of the electrostatic lens was demonstrated through a series of electron beam patterns observed in real time with a field emission microscope inside a scanning electron microscope.