• DocumentCode
    1860494
  • Title

    Programmable batch assembly of microparts with 100% yield

  • Author

    Hoo, J. ; Baskaran, R. ; Bohringer, K.F.

  • Author_Institution
    Univ. of Washington, Seattle, WA, USA
  • fYear
    2009
  • fDate
    21-25 June 2009
  • Firstpage
    829
  • Lastpage
    832
  • Abstract
    This paper demonstrates a novel method to perform micropart (370 times 370 times 150 mum3) delivery to receptor sites (20 times 10 array) with a batch assembly process that leads to 100% yield within tens of seconds. The delivery mechanism is statistically characterized and a chemical kinetics inspired model previously proposed is extended. Based on this understanding, repeatable and programmable 100% yield assembly is achieved in open loop and feedback configurations.
  • Keywords
    batch production systems; microassembling; packaging; reaction kinetics; chemical kinetics inspired model; feedback configuration; micropart delivery; microparts assembly; open loop configuration; packaging; programmable batch assembly; receptor sites; size 150 mum; size 370 mum; yield assembly; Assembly systems; Chemicals; Feedback loop; Kinetic theory; Lead; Liquids; Packaging; Robotic assembly; Self-assembly; Surface tension; Self-assembly; heterogeneous integration; packaging;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
  • Conference_Location
    Denver, CO
  • Print_ISBN
    978-1-4244-4190-7
  • Electronic_ISBN
    978-1-4244-4193-8
  • Type

    conf

  • DOI
    10.1109/SENSOR.2009.5285762
  • Filename
    5285762