• DocumentCode
    1863519
  • Title

    Automatic Mixed-Dimensional MEMS Modeling

  • Author

    Yi Su ; Chong, C.S.

  • fYear
    2005
  • fDate
    2005
  • Firstpage
    243
  • Lastpage
    248
  • Keywords
    Analytical models; Biological system modeling; Chemical elements; Computational modeling; Medical simulation; Mesh generation; Microelectromechanical devices; Micromechanical devices; Reduced order systems; Solid modeling;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Intelligent Mechatronics. Proceedings, 2005 IEEE/ASME International Conference on
  • Print_ISBN
    0-7803-9047-4
  • Type

    conf

  • DOI
    10.1109/AIM.2005.1500997
  • Filename
    1500997