Pressure stable thermoelectric flow sensors by means of membrane perforation

Author

Kropp, M. ; Kutzner, C. ; Hartgenbusch, N. ; Gu, S. ; Sosna, C. ; Buchner, R. ; Hauptmann, P. ; Lang, W.

Author_Institution

IMSAS, Univ. of Bremen, Bremen, Germany

fYear

2009

fDate

21-25 June 2009

Firstpage

1130

Lastpage

1133

Abstract

A commonly used method for measurements of small liquid flows are membrane based thermoelectric flow sensors. High temperature stable flow sensors have been developed and fabricated at IMSAS. A pressure stable version of these sensors has been developed by creating a membrane with perforation. Thereby a backpressure compensation is achieved. Here we present the fabrication process, first measurements and simulation results showing pressure stability to at least 8 bar.

Keywords

flow measurement; flow sensors; membranes; microsensors; thermoelectric devices; backpressure compensation; membrane; perforation; pressure stability; small liquid flow measurement; thermoelectric flow sensors; Biomembranes; Chemical sensors; Fluid flow measurement; Pressure measurement; Sensor systems; Silicon compounds; Temperature sensors; Thermal sensors; Thermoelectricity; Wafer bonding; flow sensor; membrane perforation; pressure stable;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International

Conference_Location

Denver, CO

Print_ISBN

978-1-4244-4190-7

Electronic_ISBN

978-1-4244-4193-8

Type

conf

DOI

10.1109/SENSOR.2009.5285929

Filename

5285929