Fabrication of dense flow sensor arrays on flexible membranes

Author

Izadi, N. ; de Boer, M.J. ; Berenschot, J.W. ; Wiegerink, R.J. ; Lammerink, T.S.J. ; Jansen, H.V. ; Mogdans, J. ; Krijnen, G.J.M.

Author_Institution

Transducers Sci. & Technol. Group, Univ. of Twente, Enschede, Netherlands

fYear

2009

fDate

21-25 June 2009

Firstpage

1075

Lastpage

1078

Abstract

Biological sensory systems often display great performance which inspires engineers to design artificial counterparts. In this paper we report the fabrication of aquatic hair based flow sensors inspired by fish lateral line. Geometrically optimized flexible membranes of SU-8 with integrated electrodes underneath have been realized in a reliable, high yield process. By separating the liquid medium from readout electrodes we decrease squeeze film damping and eliminate electrolysis. The procedure allows dense membrane array fabrication.

Keywords

bio-inspired materials; flow sensors; membranes; microfabrication; microsensors; sensor arrays; SU-8; aquatic hair; biological sensory systems; dense flow sensor arrays; electrolysis; fish lateral line; flexible membranes; readout electrodes; squeeze film damping; Biomembranes; Biosensors; Design engineering; Displays; Electrodes; Fabrication; Hair; Marine animals; Reliability engineering; Sensor arrays; Biomimetic; DRIE; Flow sensors; Lateral line; SU-8;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International

Conference_Location

Denver, CO

Print_ISBN

978-1-4244-4190-7

Electronic_ISBN

978-1-4244-4193-8

Type

conf

DOI

10.1109/SENSOR.2009.5285945

Filename

5285945