• DocumentCode
    1872258
  • Title

    Microfabrication Of Sensors And Actuators For Microrobots

  • Author

    Ehrfeld, W. ; Gotz, F. ; Munchmeyer, D. ; Schmidt, Dan

  • Author_Institution
    Steag AG, Bereich MT
  • fYear
    1988
  • fDate
    Oct. 31 1988-Nov. 2 1988
  • Firstpage
    3
  • Lastpage
    7
  • Keywords
    Actuators; Application specific integrated circuits; Fabrication; Integrated circuit manufacture; Integrated circuit technology; Manufacturing processes; Robot sensing systems; Robotic assembly; Sensor systems and applications; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Intelligent Robots, 1988., IEEE International Workshop on
  • Conference_Location
    Tokyo, Japan
  • Type

    conf

  • DOI
    10.1109/IROS.1988.592385
  • Filename
    592385
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1872258