• DocumentCode
    1872526
  • Title

    Robotics In Microelectronics Manufacturing

  • Author

    Hackwood, S.

  • Author_Institution
    Center for Robotic Systems in Microelectronics, University of California Santa Barbwa
  • fYear
    1988
  • fDate
    Oct. 31 1988-Nov. 2 1988
  • Firstpage
    27
  • Lastpage
    33
  • Keywords
    Application specific integrated circuits; Flexible manufacturing systems; Manufacturing automation; Manufacturing processes; Microelectronics; Production facilities; Prototypes; Robotics and automation; Robots; Semiconductor device manufacture;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Intelligent Robots, 1988., IEEE International Workshop on
  • Conference_Location
    Tokyo, Japan
  • Type

    conf

  • DOI
    10.1109/IROS.1988.592397
  • Filename
    592397
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1872526