A novel in-situ lightpipe pyrometer calibration technique

We present a novel method for calibrating lightpipe pyrometers in-situ, using an RTP chamber modified for that specific purpose. The chamber uses a wafer of high emissivity, which is further enhanced by a highly reflective, cool surface placed beneath it. We present data comparing consistency of traditional blackbody calibration of lightpipe pyrometers versus the same pyrometers undergoing the new method. We discuss the advantages of this calibration method over traditional blackbody calibration methods. We discuss practical methods for maintaining calibration consistency and repeatability. Finally, we discuss methods for consistent, accurate calibration of multiple pyrometers simultaneously.