Ultracompact optoflex neural probes for high-resolution electrophysiology and optogenetic stimulation

We report on the development of high-density neural probes for distributed neuronal recording and stimulation. Our hybrid silicon-parylene probes provide high spatial resolution and incorporate a monolithically integrated flexible cable to address the challenge of stable recordings in chronic neural implants. We address a long-standing but often overlooked issue in parylene processing to realize reliable multilayer interconnects. We also discuss the design of ultracompact parylene optical waveguides for localized optogenetic stimulation of neurons. We demonstrate in-vivo electrophysiology recordings in mice.