• DocumentCode
    187351
  • Title

    A resonant micro-cantilever frequency tracking system based on dynamic phase difference

  • Author

    Wei Zhao ; Haitao Yu ; Yanbo Ren ; Pengchen Xu ; Xinxin Li

  • Author_Institution
    Shanghai Inst. of Microsyst. & Inf. Technol., Shanghai, China
  • fYear
    2014
  • fDate
    12-15 May 2014
  • Firstpage
    1484
  • Lastpage
    1486
  • Abstract
    Gravimetric system based on resonant micro-cantilever had drawn significant attention in trace material detection. Adsorption quantity could be measured by the change of cantilever´s resonant frequency, and phase-locked loop (PLL) was commonly used to keep the cantilever resonating. However, in the application of traditional PLL, we have to adjust parameters of the phase shifter to make sure the locked frequency matching with the cantilever´s resonant frequency. In this manuscript, we promoted a frequency tracking system based on software phase-locked loop. Locked phase was calculated automatically, so the system could match with cantilevers of different resonant frequency, and no adjusting is need anymore. This system could combine with instruments based on frequency tracking and detection easily, not only limited to resonant cantilevers.
  • Keywords
    adsorption; cantilevers; frequency estimation; gravimeters; micromechanical resonators; phase locked loops; phase shifters; adsorption quantity measurement; dynamic phase difference; frequency detection; gravimetric system; locked frequency matching; locked phase calculation; parameter adjustment; phase locked loop; phase shifter; resonant microcantilever frequency tracking system; software PLL; trace material detection; Cavity resonators; Computers; Data acquisition; Instruments; Phase locked loops; Resonant frequency; Sensitivity; MEMS; cantilever; frequency track; phase-locked loop; trace detection;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Instrumentation and Measurement Technology Conference (I2MTC) Proceedings, 2014 IEEE International
  • Conference_Location
    Montevideo
  • Type

    conf

  • DOI
    10.1109/I2MTC.2014.6860992
  • Filename
    6860992