Multi roof tile-shaped vibration modes in mems cantilever sensors for liquid monitoring purposes

Author

Pfusterschmied, Georg ; Kucera, Martin ; Ruiz-Diez, Victor ; Bittner, Achim ; Sanchez-Rojas, Jose Luis ; Schmid, Ulrich

Author_Institution

Inst. of Sensor & Actuator Syst., Vienna Univ. of Technol., Vienna, Austria

fYear

2015

fDate

18-22 Jan. 2015

Firstpage

718

Lastpage

721

Abstract

We realized piezoelectrically self-actuated self-sensing cantilever sensors for liquid monitoring purposes excited in higher orders of the roof tile-shaped mode. This advanced class of vibration mode supports very high Q-factors in liquid media and high volume strain values which result in combination with an optimized electrode design in enhanced strain related conductance peaks. Therefore, precise fluid property measurements even for highly viscous liquids like D500 (~ 430 cP) are feasible.

Keywords

Q-factor; cantilevers; microsensors; vibrations; D500; MEMS cantilever sensors; Q-factors; enhanced strain-related conductance peaks; fluid property measurement; high-volume strain value; highly-viscous liquids; liquid media; liquid monitoring purpose; multiroof tile-shaped vibration modes; optimized electrode design; piezoelectrically self-actuated self-sensing cantilever sensors; Electrodes; Liquids; Media; Q-factor; Sensors; Strain; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on

Conference_Location

Estoril

Type

conf

DOI

10.1109/MEMSYS.2015.7051058

Filename

7051058