Process monitoring and in line composition assessment of high throughput thin film processes by resonant Raman spectroscopy

Raman scattering is an optical non destructive technique well suited for quality control and process monitoring in advanced chalcogenide PV thin film technologies. Combination with suitable excitation and light collection optics allows for the analysis of phase, structure or composition inhomogeneities at both macroscopic and microscopic scales. Applicability of these techniques for the non destructive assessment of these complex absorbers at early process stages during the fabrication of the cells and modules will be discussed and evaluated.