• DocumentCode
    1875346
  • Title

    Dynamics of Silicon Micro-Heaters: Modelling and Experimental Identification

  • Author

    Wiesmann, Dorothea ; Sebastian, Abu

  • Author_Institution
    IBM Zurich Research Laboratory, Rüschlikon, Switzerland
  • fYear
    2006
  • fDate
    2006
  • Firstpage
    182
  • Lastpage
    185
  • Abstract
    In this paper we present a novel tractable feedback model that captures the thermo-electric dynamics of silicon micro-heaters. The validity of the model is demonstrated using an analytical derivation from physical principles. Furthermore the model is applied to the synthesis of specific temperature profiles.
  • Keywords
    Electric variables; Fabrication; Feedback; Geometry; Heat sinks; Resistance heating; Resistors; Silicon; Temperature; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on
  • Conference_Location
    Istanbul, Turkey
  • ISSN
    1084-6999
  • Print_ISBN
    0-7803-9475-5
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2006.1627766
  • Filename
    1627766
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1875346