• DocumentCode
    1876376
  • Title

    Electric field induced alignment of carbon nanotubes grown by CVD

  • Author

    Obraztsov, A.N. ; Zolotukhin, A.A. ; Volkov, A.P. ; Roddatis, V.V. ; Chakhovskoi, Andrei G.

  • Author_Institution
    Dept. of Phys., Moscow State Univ., Russia
  • fYear
    2004
  • fDate
    11-16 July 2004
  • Firstpage
    252
  • Lastpage
    253
  • Abstract
    In this report we present results of our experiments devoted to developing of the method for controllable growth of CNT aligned in different directions. For this purpose our usual setup for CVD was modified to provide shielding of the substrate from electric field existing between the cathode and the anode when the high voltage is applied to activate dc discharge. Generation of C2 species occurs in the plasma, and then these species are deposited on the substrate surface via the holes in the mask. With appropriate conditions we were able to obtain CNT growth on various substrates. Also, shapes of randomly oriented CNT grown onto Ni plate and on quartz substrate patterned with Ni thin film stripes are shown. An application of bias voltage between the Ni stripes allows us to obtain partial alignment of CNT along the direction of the electric field between the stripes. This confirms a possibility to achieve controllable growth of the CNTs.
  • Keywords
    carbon nanotubes; plasma CVD; C; C2 species; CVD; anode; bias voltage; carbon nanotubes; cathode; dc discharge; electric field induced alignment; high voltage; mask; plasma; shielding; thin film stripes; Anodes; Carbon nanotubes; Cathodes; Conducting materials; Energy storage; Material storage; Plasma applications; Substrates; Surface discharges; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Nanoelectronics Conference, 2004. IVNC 2004. Technical Digest of the 17th International
  • Print_ISBN
    0-7803-8397-4
  • Type

    conf

  • DOI
    10.1109/IVNC.2004.1355000
  • Filename
    1355000