DocumentCode
1876650
Title
Microfabrication of Helmholtz Coils with Integrated Channels for NMR Spectroscopy
Author
Ehrmann, K. ; Saillen, N. ; Vincent, F. ; Massin, C. ; Besse, P.-A. ; Popovic, R.S.
Author_Institution
Institute of Microsystems, EPFL – Ecole Polytechnique Fédérale de Lausanne, SWITZERLAND
fYear
2006
fDate
2006
Firstpage
366
Lastpage
369
Abstract
A new technology for the microfabrication of Helmholtz microcoils with integrated SU-8 channels for NMR spectroscopy is presented. These Helmholtz microcoils demonstrate superior NMR performance regarding spin excitation uniformity compared to planar microcoils. The improved spin excitation uniformity opens the way to advanced chemical analysis using complex RF-pulse sequences. The fabricated Helmholtz coils have Q-factor greater than 20 due to electroplated coil turns and vias, which connect the upper and lower turns. The laminated SU-8 microchannel technology allows the implementation of further fluidic functions. Analyzing living cells, mechanical filters can be integrated for sample concentration and enhanced detection.
Keywords
Biomembranes; Chemical technology; Coils; Glass; Lithography; Mass spectroscopy; Microchannel; Nuclear magnetic resonance; Polyimides; Q factor;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on
Conference_Location
Istanbul, Turkey
ISSN
1084-6999
Print_ISBN
0-7803-9475-5
Type
conf
DOI
10.1109/MEMSYS.2006.1627812
Filename
1627812
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