• DocumentCode
    1879113
  • Title

    Vertical Drive Micro Actuator Using SMA Thin Film For A Smart Button

  • Author

    Yoshikawa, W. ; Sasabe, A. ; Sugano, K. ; Tsuchiya, T. ; Tabata, O. ; Ishida, A.

  • Author_Institution
    Kyoto University, Japan
  • fYear
    2006
  • fDate
    2006
  • Firstpage
    734
  • Lastpage
    737
  • Abstract
    This paper presents the performance of a shape memory alloy (SMA) thin film micro-actuator for a small tactile display to reproduce an object texture to a fingertip. Maximum displacement of 30 μm under 4.2 mN load with an actuator length of 1 mm, which fulfills the minimum requirements for reproducing a texture to a fingertip, is realized by the newly proposed SMA thin film actuator structure.
  • Keywords
    Computer displays; Etching; Fabrication; Intelligent actuators; Microactuators; Performance analysis; Polymers; Sputtering; Substrates; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on
  • Conference_Location
    Istanbul, Turkey
  • ISSN
    1084-6999
  • Print_ISBN
    0-7803-9475-5
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2006.1627904
  • Filename
    1627904
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1879113