DocumentCode
1879267
Title
Analysis and Experiment of Diaphragm Deflection By a Shear Mode PZT Actuator in Microfluidic Application
Author
Chen, Shih-Chang ; Cheng, Chiang-Ho ; Lin, Yi-Cheng
Author_Institution
National Changhua University of Education, TAIWAN
fYear
2006
fDate
2006
Firstpage
762
Lastpage
765
Abstract
A novel actuating design that uses the shear deformation of a lead zirconate titanate (PZT) actuator to deflect the diaphragm is proposed and applied to the microfluidic system. The analytical close-form solutions for the deflection and sweep volume of the diaphragm without fluid load are derived. The results are compared with numerical solutions and verified by experiments, which reveals acceptable agreement. The application of this design is realized in a micropump or a microdroplet ejector.
Keywords
Actuators; Bonding forces; Microfluidics; Micropumps; Microstructure; Polarization; Pumps; Silicon; Titanium compounds; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on
Conference_Location
Istanbul, Turkey
ISSN
1084-6999
Print_ISBN
0-7803-9475-5
Type
conf
DOI
10.1109/MEMSYS.2006.1627911
Filename
1627911
Link To Document