• DocumentCode
    1880281
  • Title

    E-Beam Photoresist and Carbon Nanotubes as Biomimetic Dry Adhesives

  • Author

    Tsai, Y.-C. ; Shih, W.-P. ; Wang, Y.-M. ; Huang, L.-S. ; Shih, P.-J.

  • Author_Institution
    Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan
  • fYear
    2006
  • fDate
    2006
  • Firstpage
    926
  • Lastpage
    929
  • Abstract
    This paper presents the fabrication and characterization of nano-fibrils mimicking gecko foot-hairs for enhanced dry adhesion. High contact area ratio of the polymer and carbon nanotube fibrils is achieved, respectively, using e-beam lithography and chemical vapor deposition. The adhesion forces from gecko foot-hairs and the artificial fibrils are measured with a customized AFM tip to evaluate the effects of different materials and surface density. With the water-vapor assisted deposition, the surface density of the carbon nanotubes is optimized for comparable adhesion forces to gecko foot-hairs.
  • Keywords
    Adhesives; Biomimetics; Carbon nanotubes; Chemical vapor deposition; Density measurement; Fabrication; Force measurement; Lithography; Polymers; Resists;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on
  • Conference_Location
    Istanbul, Turkey
  • ISSN
    1084-6999
  • Print_ISBN
    0-7803-9475-5
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2006.1627952
  • Filename
    1627952