DocumentCode
1880281
Title
E-Beam Photoresist and Carbon Nanotubes as Biomimetic Dry Adhesives
Author
Tsai, Y.-C. ; Shih, W.-P. ; Wang, Y.-M. ; Huang, L.-S. ; Shih, P.-J.
Author_Institution
Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan
fYear
2006
fDate
2006
Firstpage
926
Lastpage
929
Abstract
This paper presents the fabrication and characterization of nano-fibrils mimicking gecko foot-hairs for enhanced dry adhesion. High contact area ratio of the polymer and carbon nanotube fibrils is achieved, respectively, using e-beam lithography and chemical vapor deposition. The adhesion forces from gecko foot-hairs and the artificial fibrils are measured with a customized AFM tip to evaluate the effects of different materials and surface density. With the water-vapor assisted deposition, the surface density of the carbon nanotubes is optimized for comparable adhesion forces to gecko foot-hairs.
Keywords
Adhesives; Biomimetics; Carbon nanotubes; Chemical vapor deposition; Density measurement; Fabrication; Force measurement; Lithography; Polymers; Resists;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on
Conference_Location
Istanbul, Turkey
ISSN
1084-6999
Print_ISBN
0-7803-9475-5
Type
conf
DOI
10.1109/MEMSYS.2006.1627952
Filename
1627952
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