• DocumentCode
    1882020
  • Title

    Generic test chip formats for ASIC-oriented semiconductor process development

  • Author

    Weber, Charles

  • Author_Institution
    Hewlett-Packard Corp., Palo Alto, CA, USA
  • fYear
    1993
  • fDate
    22-25 Mar 1993
  • Firstpage
    247
  • Lastpage
    252
  • Abstract
    A novel approach towards test chip and test structure design is accelerating the introduction of application specific integrated circuit (ASIC)-oriented CMOS process generations. Specialized test chips address quality manufacturability and process integration issues within the proper time frame. Six generic test chip design formats repeat from generation to generation with scaled layout rules
  • Keywords
    CMOS integrated circuits; application specific integrated circuits; integrated circuit manufacture; integrated circuit testing; quality control; semiconductor process modelling; ASIC-oriented semiconductor process development; CMOS process; generic test chip; process integration; quality manufacturability; scaled layout rules; test chip formats; test structure design; Application specific integrated circuits; Chip scale packaging; Circuit testing; Computer aided manufacturing; Fabrication; Life estimation; Process control; Random access memory; Semiconductor device testing; System testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronic Test Structures, 1993. ICMTS 1993. Proceedings of the 1993 International Conference on
  • Conference_Location
    Sitges
  • Print_ISBN
    0-7803-0857-3
  • Type

    conf

  • DOI
    10.1109/ICMTS.1993.292911
  • Filename
    292911