Finite element simulation and theoretical analysis of microelectromechanical system relays

This paper studies the static and dynamic behaviors of a novel microrelay applied in microelectromechanical systems (MEMS) by electromagnetic attraction. The device is composed of a square planar coil, a movable magnetic film with two-supporting cantilever beams and a pair of contacts. The electromagnetic force yielded by the exciting electromagnetic coil actuates the microrelay, and the main advantage is its capability of providing higher forces over relatively large distance. Static and dynamic finite element (FE) simulations are implemented to obtain the mechanical characteristics of the microrelay, the natural frequencies and mode shapes under different levels of electromagnetic attraction. Theoretical studies on the dynamic model are developed to validate the FE simulation results. Good agreement is found between the FE simulation and the theoretical analysis.