CNT field emission based ultra-high vacuum measurements

Author

Jian Zhang ; Yangyang Zhao ; Yongjun Cheng ; Detian Li ; Changkun Dong

Author_Institution

Inst. of Micro-nano Struct. & Optoelectron., Wenzhou Univ., Wenzhou, China

fYear

2015

fDate

13-17 July 2015

Firstpage

182

Lastpage

183

Abstract

The ultra-high vacuum measurement properties are investigated on the Leybold extract gauge based on carbon nanotube (CNT) field emission. The CNT field emitters are grown directly on catalytic substrates with strong nanotube adhesion, excellent emission properties, and low outgassing effect. The CNT gauge responds linearly to nitrogen pressure in the range from 10^-6 to 10^-11 Torr with sensitivities of about 3 torr^-1, under the anode current of 46μA and the anode votagle of 430V. The measurement of pressure down to 10^-12 torr is expected under higher cathode current and the addition of a shielding electrode to constrain the electron energy in order to improve the gas ionization efficiency and minimize the EDS & x-ray effects.

Keywords

carbon nanotubes; cathodes; electron field emission; gauges; nitrogen; vacuum measurement; vacuum microelectronics; C; CNT field emission; CNT field emitters; CNT gauge; Leybold extract gauge; N; X-ray effects; anode current; anode voltage; carbon nanotube; cathode current; electron energy; emission properties; gas ionization efficiency; nanotube adhesion; nitrogen pressure; outgassing effect; shielding electrode; ultra-high vacuum measurement properties; Anodes; Carbon nanotubes; Current measurement; Electron sources; Ionization; Nitrogen; Vacuum technology; carbon nanotube; field emission; ionization gauge; ultra-high vaccum;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Nanoelectronics Conference (IVNC), 2015 28th International

Conference_Location

Guangzhou

Print_ISBN

978-1-4673-9356-0

Type

conf

DOI

10.1109/IVNC.2015.7225574

Filename

7225574