Fluid driven microactuator with feedback mechanism

Author

Ikei, Yasushi ; Koga, Akihiro ; Morkiawa, H. ; Okawa, Yoshikuni

Author_Institution

Tokyo Metropolitan Inst. of Technol., Japan

fYear

1993

fDate

7-10 Feb 1993

Firstpage

213

Lastpage

218

Abstract

A prototype model of a fluid-driven microactuator, which has a planar piston, a four-way control valve, and an input shaft with a feedback link to regulate the valve, is described. The actuator is a sort of mechanical amplifier to augment the positional deviation and provide force at the input shaft. Fabrication of the actuator includes bulk micromachining of two pieces of silicon substrate and subsequent substrate-supported assembly using electrostatic bonding. The merits of the design are expected to be in output density, scalability, and feedback ability without electronic devices. The output force and transfer characteristics were examined to ascertain approximate linearity

Keywords

actuators; etching; feedback; hydraulic control equipment; micromechanical devices; valves; Si; anisotropic etching; approximate linearity; bulk micromachining; dicing; electrostatic bonding; feedback mechanism; fluid-driven microactuator; four-way control valve; input shaft; mechanical amplifier; output density; output force characteristics; planar piston; prototype model; scalability; substrate-supported assembly; transfer characteristics; Electrostatic actuators; Fabrication; Feedback; Microactuators; Micromachining; Pistons; Prototypes; Shafts; Silicon; Valves;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1993, MEMS '93, Proceedings An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE.

Conference_Location

Fort Lauderdale, FL

Print_ISBN

0-7803-0957-X

Type

conf

DOI

10.1109/MEMSYS.1993.296920

Filename

296920