Real three dimensional micro fabrication using stereo lithography and metal molding

Author

Ikuta, K. ; Hirowatari, Ken

Author_Institution

Dept. of Mech. Syst. Eng., Kyushu Inst. of Technol., Fukuoka, Japan

fYear

1993

fDate

7-10 Feb 1993

Firstpage

42

Lastpage

47

Abstract

A technique for three-dimensional micro fabrication using stereo lithography is proposed. It is called the IH process (integrated hardened polymer stereo lithography) and is suitable for microstructures made of both polymer and metals. The experimental apparatus developed and the fabrication of various 3-D microstructures, such as bending pipe, connected pipe, microcoil spring, and one-way valve, are described

Keywords

electroplating; microassembling; micromechanical devices; photolithography; polymers; valves; 3-D microstructures; MEMS; bending pipe; connected pipe; electroplated metal; integrated hardened polymer; metal molding; microcoil spring; one-way valve; polymer cast; real 3D microfabrication; stereo lithography; Fabrication; Laser beams; Lithography; Machining; Mechanical systems; Polymers; Shape; Silicon; Systems engineering and theory; Thickness control;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1993, MEMS '93, Proceedings An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE.

Conference_Location

Fort Lauderdale, FL

Print_ISBN

0-7803-0957-X

Type

conf

DOI

10.1109/MEMSYS.1993.296949

Filename

296949