Microelectronics at the University of Minnesota

The Microelectronics Laboratory for Research and Education (MLRE) at the University of Minnesota is a class-10 semiconductor fabrication facility dedicated to support university research and education, as well as to collaborate with other universities and industry in microelectronics-related areas. The facility and its equipment are used for work in areas such as compound semiconductor growth, optoelectronics, germanium-silicon, sensors, micromechanics, and standard silicon processing. Examples of external activities include collaborative work with the Center for X-ray Lithography at the University of Wisconsin in the areas of X-ray mask materials and 0.25-μm CMOS process development, facility usage by a local company researching and phototyping nonvolatile memories, and low-stress silicon nitride film fabrication for a research group at a major semiconductor house