Pt/WO3 microsensor grown by cold wall reactor Aerosol Assisted Chemical Vapor Deposition for C6H6 and NO2 detection

Aerosol Assisted Chemical Vapor Deposition (AACVD) induced via localized heating of the gas sensor shows high flexibility, low cost and capability for the direct synthesis of low-dimensional metal oxide nanostructures in a wide scale of substrates. In this work, we report for the first time the successful co-deposition of tungsten trioxide nanowires decorated with Pt nanoparticles (Pt/WO₃) in a single step, via AACVD method employing the self-heating capability of MEMS transducer platforms. E-SEM and XRD analysis have been used to investigate the morphology and the composition of the nanostructures grown. The fabricated gas microsensors have been tested toward different concentration of NO₂ and C₆H₆. In comparison with our previous work, these new results show a clear improvement in the synthesis of the nanostructures, a highly enhanced sensitivity towards small concentrations of benzene, and good sensitivity and selectivity toward NO₂.