Power Semiconductors: Status and Trends in Process/Device/Circuit CAD

Summary form only given. High-voitage semiconductor devices used in advanced power conditioning systems can be broadly catagorized into two classes: (1) low- and medium-power devices for applications below 200V (mostly power MOSFET´s) and (2) medium- and high-power dsvices used for applications upto several kilovolts (predominantly conductivity modulated power devices such as the IGBTs and MCTs). Unlike small-signal devices, power devices are fabrimtad using wafer processing at temperatures in excgss of 1 OOO*C, and henC8, process models must incorporate high-temperature diffusion physics.