DocumentCode
1895776
Title
On the evaluation of damping forces in MEMS
Author
Frangi, A. ; Corigliano, Alberto ; Spinola, G.
Author_Institution
Dept. of Struct. Eng., Milan Politecnico, Italy
fYear
2005
fDate
18-20 April 2005
Firstpage
207
Lastpage
213
Abstract
The analysis of micro-electro-mechanical structures is addressed focusing on the evaluation of damping forces exerted by the surrounding gas on moving parts. A mixed formulation based on both velocity and traction integral equations is employed and accelerated via a fast multipole method. Several examples are addressed in order to test the convergence properties of the proposed formulation.
Keywords
continuum mechanics; convergence; damping; flow; integral equations; micromechanical devices; MEMS; continuum mechanics; convergence; damping forces; fast multipole method; flow; micro-electro-mechanical structures; micromechanical devices; surrounding gas; traction integral equations; velocity integral equations; Acceleration; Damping; Frequency; Integral equations; Large-scale systems; Micromechanical devices; Production; Solids; Structural engineering; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2005. EuroSimE 2005. Proceedings of the 6th International Conference on
Print_ISBN
0-7803-9062-8
Type
conf
DOI
10.1109/ESIME.2005.1502802
Filename
1502802
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