DocumentCode
1895834
Title
The study on sandwich structures based on fullerite films
Author
Berdinsky, A.S. ; Shevtsov, Yu.V. ; Fink, D. ; Chun, Hui-Gon ; Trubin, S.V. ; Ayupov, B.M. ; Shubin, Yu.V. ; Chadderton, L.T.
Author_Institution
Dept. of Semicond. Devices & Microelectron., Novosibirsk State Tech. Univ., Russia
Volume
1
fYear
2003
fDate
6-6 July 2003
Firstpage
182
Abstract
We report on the technology of formation of sandwich structures based on fullerite films and on experimental results in research of optical and conductivity properties of these sandwich samples. Single crystals of sapphire (100) or silicon were used as substrates. The sandwich specimens were based on the structure M/C/sub 60//M (M = Cr, Pd, Ag, Al, Cu). The thickness of the fullerite films was /spl sim/0.2-1.0 /spl mu/m. The area of the C/sub 60/ film under the top contact was /spl sim/ 1 cm/sup 2/. The specimens have been investigated by infrared spectroscopy, spectra-photometry, ellipsometry and X-ray diffraction analysis. Measurements of the current/voltage characteristics and research on the temperature dependence of conductivity were performed as well. It was shown that metals such as Cr, Pd, Ag, Al, and Cu penetrate easily into the fullerite films. It appears that these specimens have a large conductivity. For silver/C/sub 60/ and other sandwich structures the conductivities show a semiconductor-like behaviour.
Keywords
X-ray diffraction; aluminium; chromium; copper; ellipsometry; fullerenes; infrared spectroscopy; interface structure; palladium; silver; thin films; Ag-C-Ag; Ag-C-Al; Ag-C-Cr; Ag-C-Cu; Ag-C-Pd; Al-C-Ag; Al-C-Al; Al-C-Cr; Al-C-Cu; Al-C-Pd; Cr-C-Ag; Cr-C-Al; Cr-C-Cr; Cr-C-Cu; Cr-C-Pd; Cu-C-Ag; Cu-C-Al; Cu-C-Cr; Cu-C-Cu; Cu-C-Pd; Pd-C-Ag; Pd-C-Al; Pd-C-Cr; Pd-C-Cu; Pd-C-Pd; X-ray diffraction analysis; current characteristics; ellipsometry; fullerite films; infrared spectroscopy; sandwich structures; sapphire; silicon; spectra-photometry; voltage characteristics;
fLanguage
English
Publisher
ieee
Conference_Titel
Science and Technology, 2003. Proceedings KORUS 2003. The 7th Korea-Russia International Symposium on
Conference_Location
Ulsan, South Korea
Print_ISBN
89-7868-617-6
Type
conf
Filename
1222433
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