The Impact of the Space Radiation Environment on Micro Electro Mechanical Systems (MEMS) and Microstructures

Micro electro mechanical system (MEMS) and microstructures yield great promise for future space applications and the requirements to understand their relationship to the uniqueness of space. A key enabler for inserting MEMS in critical flight applications is an understanding of the environmental impacts including radiation effects. MEMS devices used in space missions are exposed to many different types of environments. These environments include manufacturing, assembly, test and qualification at the part, board and assembly levels. Subsystem and system level environments include pre-launch, launch, and mission. Each of these environments contributes unique stress factors. An overview of these stress factors is given along with a discussion of the environments with an emphasis on the radiation environment.