Modelling of a micro Coriolis mass flow sensor for sensitivity improvement

Author

Groenesteijn, J. ; van de Ridder, L. ; Lotters, J.C. ; Wiegerink, R.J.

Author_Institution

MESA+ Inst. for Nanotechnol., Univ. of Twente, Enschede, Netherlands

fYear

2014

fDate

2-5 Nov. 2014

Firstpage

954

Lastpage

957

Abstract

We have developed a multi-axis flexible body model with which we can investigate the behavior of (micro) Coriolis mass flow sensors with arbitrary channel geometry. The model has been verified by measurements on five different designs of micro Coriolis mass flow sensors. The model predicts the Eigen frequency of the first two modes within 10% when the sensor tube is filled with air, water or iso-propyl alcohol. The complex shape and high aspect ratio of the micro channels do not allow conventional FEM modelling. Instead the Matlab package SPACAR is used, which allows to model the sensor with a limited number of elements, providing fast and accurate numerical computations. This allows optimization of channel geometry and positioning of the sensing structures. The model can also be applied to other resonating structures.

Keywords

finite element analysis; flow measurement; flow sensors; mass measurement; microchannel flow; microsensors; optimisation; FEM modelling; Matlab package SPACAR; arbitrary channel geometry; eigenfrequency; isopropyl alcohol; microCoriolis mass flow sensor; microchannel; multiaxis flexible body model; numerical computation; optimization; resonating structure; sensitivity improvement; water; Computational modeling; Electron tubes; Finite element analysis; Fluid flow measurement; Mathematical model; Sensitivity; Shape; Coriolis mass flow sensor; flexible body model; modelling;

fLanguage

English

Publisher

ieee

Conference_Titel

SENSORS, 2014 IEEE

Conference_Location

Valencia

Type

conf

DOI

10.1109/ICSENS.2014.6985160

Filename

6985160