Patterned electrodes for thickness shear mode quartz resonators to achieve uniform mass sensitivity distribution

Development of an electrode-modified thickness shear mode (TSM) quartz resonator that is responsive to nanogram mass loadings, while exhibiting a mass sensitivity profile that is independent of material placement on the sensor platform, is the aim of this study. The resulting nanogram balance would greatly enhance the field of mass measurement and become useful in applications like droplet gravimetry, the study of non-volatile residue (NVR) contamination in solvents. A ring electrode design predicted by an analytical theory for sensitivity distribution to achieve the desired uniform mass sensitivity distribution is presented in this work. Using a microvalve capable of depositing nanogram droplets of a polymer solution, and a linear stepping stage for radial positioning of these droplets across the sensor platform, measurements of the mass sensitivity distributions were conducted and presented. The measurements agree well with theory. Further improvements are possible and are identified to achieve better uniformity and to reduce the instability of resonant frequency of these devices.