Development of a MEMS rotation sensor for oilfield applications

Author

Projetti, Maxime ; Vancauwenberghe, Olivier ; Paulson, Hans ; Goujon, Nicolas ; Marty, Frederic ; Aubry, Denis

Author_Institution

MEMS Technol. Center, Schlumberger, Elancourt, France

fYear

2014

fDate

2-5 Nov. 2014

Firstpage

1595

Lastpage

1598

Abstract

A new capacitive microelectromechanical rotation sensor (R-MEMS) with very high performances (low noise, high bandwidth) was developed for oilfield applications. After a thorough design phase based on analytical, finite element and MATLAB/Simulink models, the first R-MEMS prototypes were microfabricated using an optimized deep reactive ion etching (DRIE) process of thick silicon on insulator (SOI) wafers and then characterized in open-loop and closed-loop configurations. Further investigations along with simulations showed different design improvements to lower the noise floor and results with the latest R-MEMS prototypes are presented.

Keywords

capacitance measurement; capacitive sensors; elemental semiconductors; finite element analysis; microfabrication; microsensors; petroleum industry; rotation measurement; silicon; silicon-on-insulator; sputter etching; DRIE process; MATLAB-Simulink model; R-MEMS sensor; SOI wafer; Si; capacitive microelectromechanical rotation sensor; closed-loop configuration; finite element model; microfabrication; oilfield application; open-loop configuration; optimized deep reactive ion etching process; thick silicon on insulator wafer; Acceleration; Electrodes; Floors; Micromechanical devices; Noise; Prototypes; Rotation measurement; angular rate; capacitive; oilfield; rotation;

fLanguage

English

Publisher

ieee

Conference_Titel

SENSORS, 2014 IEEE

Conference_Location

Valencia

Type

conf

DOI

10.1109/ICSENS.2014.6985323

Filename

6985323