Piezoresistive geometry for maximizing microcantilever array sensitivity

Our group has focused on the development of piezoresistive cantilevers for gas detection using a nonreaction-based method - viscous damping. This work represents a continuation of this effort by reporting on the development, fabrication and testing of a second generation device consisting of asymmetric piezoresistive cantilevers to maximize device sensitivity. The first mode of resonance, static & dynamic sensitivities, and Q-factors ranged from 40 kHz - 63 kHz, 1-6 Omega/mum & 3-17 Omega/mum, and 1700 - 4200, respectively, depending on piezoresistor geometry and beam length. The redesigned piezoresistive microcantilevers were 15 - 200 times more sensitive than the best symmetric design previously reported by our group.