DocumentCode
1902917
Title
Finite Element Analysis of Thermal Effects in an X-Ray Mask
Author
Li, D.C. ; Chen, J.T. ; Chyuan, S.W. ; Sun, C.Y.
fYear
1993
fDate
6-7 March 1993
Firstpage
103
Keywords
Atmospheric modeling; Biomembranes; Civil engineering; Finite element methods; Resists; Sun; Temperature distribution; Thermal stresses; Thermoelasticity; X-ray lithography;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Modeling & Simulation, 1993. SMS Technical Digest. 1993 Symposium on
Conference_Location
Taipei, Taiwan
Print_ISBN
0-7803-1225-2
Type
conf
DOI
10.1109/SMS.1993.664576
Filename
664576
Link To Document