Modeling of MEMS Thermal Actuation with External Heat Source

This paper presents the thermal analysis and design of micro-actuators based on standard MEMS technology irrespective of the input heat source. The typical approach for driving this kind of actuators is by applying an electric current that flows through the device and generates Joule heating. However, this requires relatively large currents and the corresponding power consumption. As an alternative to electrically driven thermal actuators, this work explores the possibility of developing thermal actuators that can be activated with an external heat source and, for example, scavenge heat from the surrounding medium. The mathematical description for heat transfer within the MEMS device is presented along with numerical simulation results. A discussion about the opportunities and limitations of externally heated thermo actuators is also presented.